Patent Assignment
Reel/Frame 032860/0748
Assignment of Assignor's Interest
Recorded: 2014-05-09
Pages: 18
Assignor
CYMER, LLC
Executed: 2014-01-06
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Properties
(24)
Alternative Fuels for Euv Light Source
Euv Optics
Drive Laser Delivery Systems for Euv Light Source
Laser Produced Plasma Euv Light Source
Laser Produced Plasma Euv Light Source
Laser Produced Plasma Euv Light Source Having a Droplet Stream Produced Using a Modulated Disturbance Wave
Gas Management System for a Laser-Produced-Plasma Euv Light Source
System Managing Gas Flow Between Chambers of an Extreme Ultraviolet (Euv) Photolithography Apparatus
Drive Laser for Euv Light Source
Spectral Purity Filters and Methods Therefor
Blind Motorized Coupling Arrangements for Coupling Uv Light Source Subsystem and Scanner Subsystem in a Uv Lithography System and Methods Therefor
Systems and Methods for Target Material Delivery in a Laser Produced Plasma Euv Light Source
Systems and Methods for Heating an Euv Collector Mirror
Debris protection system having a magnetic field for an EUV light source
Systems and Methods for Collector Mirror Temperature Control Using Direct Contact Heat Transfer
Patent:
7,641,349 →
Application:
12/284,585 →
Systems and Methods for Drive Laser Beam Delivery in an Euv Light Source
Drive Laser for Euv Light Source
Euv Optics
Laser Produced Plasma Euv Light Source
Laser Produced Plasma Euv Light Source Having a Droplet Stream Produced Using a Modulated Disturbance Wave
Laser Produced Plasma Euv Light Source
Laser-Produced-Plasma Euv Light Source
Drive Laser for Euv Light Source
Euv Optics
Related Assignments
(8)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 15, 2008
From: BYKANOV, ALEXANDER N; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 021530/0559 →
Assignment of Assignor's Interest
Sep 15, 2008
From: SIMMONS, RODNEY D.
To: CYMER, INC.
Reel/Frame 021530/0695 →
Assignment of Assignor's Interest
Nov 7, 2008
From: CHROBAK, CHRISTOPHER P.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 021803/0356 →
Assignment of Assignor's Interest
Jan 7, 2010
From: PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; PAXTON, JASON
To: CYMER, INC.
Reel/Frame 023748/0573 →
Assignment of Assignor's Interest
Oct 18, 2013
From: ERSHOV, ALEXANDER I.; FOMENKOV, IGOR V.; BOWERING, NORBERT; HOFFMAN, JERZY R.
To: CYMER, LLC
Reel/Frame 031438/0655 →
Merger
Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032420/0153 →
Merger
Mar 13, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032433/0653 →
Merger
Mar 13, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032427/0529 →