Patent Assignment
Reel/Frame 023748/0573
Assignment of Assignor's Interest
Recorded: 2010-01-07
Pages: 3
Assignors
PARTLO, WILLIAM N.
Executed: 2009-12-03
FOMENKOV, IGOR V.
Executed: 2009-12-01
PAXTON, JASON
Executed: 2009-11-20
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT., MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems and Methods for Drive Laser Beam Delivery in an Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.