Patent Assignment
Reel/Frame 032433/0653
Merger
Recorded: 2014-03-13
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(20)
Alternative Fuels for Euv Light Source
Device and Method to Stabilize Beam Shape and Symmetry for High Energy Pulsed Laser Applications
Chamber for a High Energy Excimer Laser Source
Methods and Apparatus for Aligning an Etalon with a Photodiode Array
Drive Laser for Euv Light Source
Window assembly for a gas discharge laser chamber
Application:
11/488,879 →
Publication:
US 2008/0013589
Euv Optics
Active Spectral Control of Duv Light Source
Drive Laser Delivery Systems for Euv Light Source
Laser Produced Plasma Euv Light Source
High Power Laser Flat Panel Workpiece Treatment System Controller
High Power Excimer Laser with a Pulse Stretcher
Laser System
Laser System
Laser System
Laser System
Laser System
Laser System
Method and Apparatus to Control Output Spectrum Bandwidth of Mopo or Mopa Laser
Laser System
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.