Patent Assignment
Reel/Frame 032745/0216
Assignment of Assignor's Interest
Recorded: 2014-04-23
Pages: 21
Assignor
CYMER, LLC
Executed: 2014-01-06
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Properties
(26)
Method and Apparatus for Euv Plasma Source Target Delivery Target Material Handling
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Method and Apparatus for Euv Light Source Target Material Handling
Systems and Methods for Deflecting Plasma-Generated Ions to Prevent the Ions from Reaching an Internal Component of an Euv Light Source
Euv Light Source Collector Lifetime Improvements
Lpp Euv Light Source Drive Laser System
Systems and Methods for Reducing the Influence of Plasma-Generated Debris on the Internal Components of an Euv Light Source
Lpp Euv Plasma Source Material Target Delivery System
Systems and Methods for Euv Light Source Metrology
Lpp Euv Light Source Drive Laser System
Euv Light Source Collector Erosion Mitigation
Patent:
7,141,806 →
Application:
11/237,649 →
Euv Light Source Collector Erosion Mitigation
Systems and Methods for Cleaning a Chamber Window of an Euv Light Source
Euv Light Source
Source Material Dispenser for Euv Light Source
Laser Produced Plasma Euv Light Source
Drive Laser for Euv Light Source
Source Material Collection Unit for a Laser Produced Plasma Euv Light Source
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Systems and Methods for Reducing the Influence of Plasma-Generated Debris on the Internal Components of an Euv Light Source
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Lpp Euv Plasma Source Material Target Delivery System
Lpp Euv Light Source Drive Laser System
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Related Assignments
(7)
Other recorded transfers of the patents in this record — the chain of ownership.
Corrective Assignment to Correct the Recordation Form Cover Sheet, 2. Name and Address of Receiving Party(Ies) Previously Recorded on Reel 016188 Frame 0436. Assignor(S) Hereby Confirms the Assignment from Inventors to Cymer, Inc.
Apr 23, 2012
From: BYKANOV, ALEXANDER N.
To: CYMER, INC.
Reel/Frame 028093/0343 →
Corrective Assignment to Correct the Recordation Form Cover Sheet, 2. Name and Address of Receiving Party(Ies) Previously Recorded on Reel 016201 Frame 0330. Assignor(S) Hereby Confirms the Assignment from Inventors to Cymer, Inc.
Apr 23, 2012
From: ALGOTS, J. MARTIN; HEMBERG, OSCAR; CHUNG, TAE H.
To: CYMER, INC.
Reel/Frame 028093/0366 →
Merger
Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032416/0794 →
Merger
Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032415/0735 →
Merger
Mar 13, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032433/0653 →
Assignment of Assignor's Interest
Apr 3, 2014
From: BYKANOV, ALEXANDER N
To: CYMER, INC.
Reel/Frame 032599/0068 →
Merger
Apr 7, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032615/0947 →