Source material dispenser for EUV light source
View Patent ↗A source material dispenser for an EUV light source is disclosed that comprises a source material reservoir, e.g. tube, that has a wall and is formed with an orifice. The dispenser may comprise an electro-actuatable element, e.g. PZT material, that is spaced from the wall and operable to deform the wall and modulate a release of source material from the dispenser. A heat source heating a source material in the reservoir may be provided. Also, the dispenser may comprise an insulator reducing the flow of heat from the heat source to the electro-actuatable element. A method of dispensing a source material for an EUV light source is also described. In one method, a first signal may be provided to actuate the electro-actuatable elements to modulate a release of source material and a second signal, different from the first, may be provided to actuate the electro-actuatable elements to unclog the orifice.
1. A source material dispenser for an EUV light source, said dispenser comprising:
a source material reservoir having a wall and formed with an orifice;
an electro-actuatable element spaced from said wall and operable to deform said wall and modulate a release of source material from said dispenser;
a heat source heating a source material in said reservoir; and
an insulator reducing the flow of heat from said heat source to said electro-actuatable element.
2. A dispenser as recited in claim 1 wherein said reservoir comprises a tube.
3. A dispenser as recited in claim 1 wherein said electro-actuatable element is selected from a group of elements consisting of a piezoelectric material, an electrostrictive material and a magnetostrictive material.
4. A dispenser as recited in claim 1 wherein said insulator is disposed between said electro-actuatable element and said wall to transmit forces therebetween.
5. A dispenser as recited in claim 4 wherein said heat source comprises a resistive material and said resistive material is interposed between said wall and said insulator.
6. A dispenser as recited in claim 1 wherein said heat source comprises a resistive material coated on said wall.
7. A dispenser as recited in claim 1 wherein said reservoir wall is made of glass, said heat source comprises a resistive material coating comprising Mo, and said insulator comprises silica.
8. A dispenser as recited in claim 1 wherein said source material comprises liquid Sn.
9. A dispenser as recited in claim 1 further comprising a cooling system for cooling said electro-actuatable element.
10. A source material dispenser for an EUV light source said dispenser comprising:
a source material reservoir having a wall and formed with an orifice;
a plurality of electro-actuatable elements, each element positioned to deform a different portion of said wail and modulate a release of source material from said dispenser.
11. A dispenser as recited in claim 10 further comprising a plurality of insulators, each insulator disposed between a respective said electro-actuatable element and said wall to transmit forces therebetween.
12. A dispenser as recited in claim 11 further comprising a heat source, said heat source comprising a resistive material interposed between said wall and at least one said insulator.
13. A dispenser us recited in claim 10 further comprising a controller for generating a first signal to actuate said electro-actuatable elements to release source material from said reservoir and a second signal, different from said first signal, for unclogging said orifice.
14. A dispenser as recited in claim 10 further comprising a heat source, said heat source comprising a resistive material coated on said wall.
15. A dispenser as recited in claim 10 wherein said source material comprises liquid Sn.
16. A dispenser as recited in claim 10 further comprising a clamp to clamp said electro-actuatable elements on said reservoir.
17. A method of dispensing a source material for an EUV light source said method comprising the acts of:
providing a source material reservoir having a wall and formed with an orifice;
providing a plurality of electro-actuatable elements, each element positioned to deform a different portion of said wall; and
actuating said elements to modulate a release of source material from said reservoir.
18. A method as recited in claim 17 further comprising the act of providing a plurality of insulators, each insulator disposed between a respective said electro-actuatable element and said wall to transmit forces therebetween.
19. A method as recited in claim 18 further comprising the act of providing a heat source, said heat source comprising a resistive material interposed between said wall and at least one said insulator.
20. A method as recited in claim 17 wherein a first drive signal is provided to actuate said electro-actuatable elements to modulate a release of source material from said reservoir and a second drive signal, different from said first drive signal, is provided to actuate said electro-actuatable elements and unclog said orifice.