Patent Assignment
Reel/Frame 032416/0794
Merger
Recorded: 2014-03-12
Pages: 24
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT - MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(26)
Method and Apparatus for Euv Light Source Target Material Handling
Systems and Methods for Deflecting Plasma-Generated Ions to Prevent the Ions from Reaching an Internal Component of an Euv Light Source
Lpp Euv Light Source Drive Laser System
Lpp Euv Light Source Drive Laser System
Thermal-Expansion Tolerant, Preionizer Electrode for a Gas Discharge Laser
Euv Light Source Collector Erosion Mitigation
Patent:
7,141,806 →
Application:
11/237,649 →
Euv Light Source Collector Erosion Mitigation
Adjustable Flow Guide to Accommodate Electrode Erosion in a Gas Discharge Laser
Patent:
7,068,697 →
Application:
11/239,581 →
Gas Discharge Laser System Electrodes and Power Supply for Delivering Electrical Energy to Same
Method and Apparatus for Gas Discharge Laser Bandwidth and Center Wavelength Control
Systems and Methods to Shape Laser Light as a Homogeneous Line Beam for Interaction with a Film Deposited on a Substrate
Systems and Methods to Shape Laser Light as a Line Beam for Interaction with a Substrate Having Surface Variations
Systems and Methods for Generating Laser Light Shaped as a Line Beam
Euv Light Source
Multi-Chamber Gas Discharge Laser Bandwidth Control Through Discharge Timing
Source Material Dispenser for Euv Light Source
Laser Produced Plasma Euv Light Source
Bandwidth Measuring Device for High Pulse Repetition Rate Pulsed Laser
Bandwidth Control Device
Source Material Collection Unit for a Laser Produced Plasma Euv Light Source
Laser System
Laser system
Application:
11/982,217 →
Publication:
US 2009/0296758
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Lpp Euv Light Source Drive Laser System
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
May 6, 2005
From: ALGOTS, J. MARTIN; HEMBERG, OSCAR; CHUNG, TAE H.
To: CRAY, WILLIAM C.
Reel/Frame 016201/0330 →
Assignment of Assignor's Interest
Aug 23, 2005
From: RETTIG, CURTIS L.; HOFFMAN, JERZY R.; VARGAS, ERNESTO L.
To: CYMER, INC.
Reel/Frame 016439/0058 →
Assignment of Assignor's Interest
Aug 30, 2005
From: ERSHOV, ALEXANDER I.; BYKANOV, ALEXANDER N.; KHODYKIN, OLEH; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 016690/0572 →
Assignment of Assignor's Interest
Oct 17, 2005
From: ERSHOV, ALEXANDER I.; BYKANOV, ALEXANDER N.; KHODYKIN, OLEH; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 016647/0267 →
Assignment of Assignor's Interest
Nov 23, 2005
From: AKINS, ROBERT P.; SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 016812/0685 →
Assignment of Assignor's Interest
Nov 30, 2005
From: PARTLO, WILLIAM N.; ERSHOV, ALEXANDER I.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 016834/0266 →
Assignment of Assignor's Interest
Dec 1, 2005
From: PARTLO, WILLIAM N.; ERSHOV, ALEXANDER I.; FOMENKOV, IGOR V.; MYERS, DAVID W.
To: CYMER, INC.
Reel/Frame 016840/0363 →
Assignment of Assignor's Interest
Dec 5, 2005
From: AMADA, YOSHIHO; CARMICHAEL, JAMES A.; MORTON, RICHARD G.; NESS, RICHARD M.
To: CYMER, INC.
Reel/Frame 016854/0324 →
Assignment of Assignor's Interest
Dec 6, 2005
From: KNOWLES, DAVID S.
To: CYMER, INC.
Reel/Frame 016858/0914 →
Assignment of Assignor's Interest
Jan 17, 2006
From: AMADA, YOSHIHO; MORTON, RICHARD G.; MOOSMAN, BRYAN G.
To: CYMER, INC.
Reel/Frame 017021/0248 →
Assignment of Assignor's Interest
Jan 17, 2006
From: TRINTCHOUK, FEDOR B.; JACQUES, ROBERT N.
To: CYMER, INC.
Reel/Frame 017021/0266 →
Assignment of Assignor's Interest
Jan 17, 2006
From: STEIGER, THOMAS D.; UJAZDOWSKI, RICHARD C.
To: CYMER, INC.
Reel/Frame 017021/0314 →
Assignment of Assignor's Interest
Apr 18, 2006
From: BYKANOV, ALEXANDER N.; KHODYKIN, OLEH
To: CYMER, INC.
Reel/Frame 017489/0802 →
Assignment of Assignor's Interest
Jun 9, 2006
From: BOWERING, NORBERT; HANSSON, BJORN A.; SIMMONS, RODNEY D.
To: CYMER, INC.
Reel/Frame 017754/0419 →
Assignment of Assignor's Interest
Jul 21, 2006
From: JACQUES, ROBERT N.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 017974/0781 →
Assignment of Assignor's Interest
Jul 25, 2006
From: RAFAC, ROBERT J.
To: CYMER, INC.
Reel/Frame 017994/0233 →
Assignment of Assignor's Interest
Oct 9, 2006
From: ERSHOV, ALEXANDER I.; PARTLO, WILLIAM N.; BOWERING, NORBERT; HANSSON, BJORN
To: CYMER, INC.
Reel/Frame 018366/0569 →
Assignment of Assignor's Interest
Jan 11, 2007
From: DAS, PALASH P.; CEFALO, ALBERT P.; KNOWLES, DAVID S.
To: CYMER, INC.
Reel/Frame 018749/0216 →
Assignment of Assignor's Interest
Jan 11, 2007
From: SHKLOVER, VITALIY; MUENZ, HOLGER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 018749/0130 →
Corrective Assignment to Correct the Recordation Form Cover Sheet, 2. Name and Address of Receiving Party(Ies) Previously Recorded on Reel 016201 Frame 0330. Assignor(S) Hereby Confirms the Assignment from Inventors to Cymer, Inc.
Apr 23, 2012
From: ALGOTS, J. MARTIN; HEMBERG, OSCAR; CHUNG, TAE H.
To: CYMER, INC.
Reel/Frame 028093/0366 →
Assignment of Assignor's Interest
Apr 23, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032745/0216 →
Merger
Sep 22, 2016
From: CARL ZEISS LASER OPTICS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040107/0446 →