Systems and methods to shape laser light as a line beam for interaction with a substrate having surface variations
View Patent ↗Systems and methods are disclosed for shaping laser light as a line beam for interaction with a film that may have an imperfect, non-planar surface. The system may include a beam stop that defines an edge; a sensor that measures a distance between a selected point on a surface of the film and a reference plane and generates a signal representative of the measured distance; and an actuator coupled to the beam stop and responsive to the signal to move a portion of beam stop edge. Movement of the beam stop edge portion shifts a corresponding portion of the focused line beam in a direction normal to the reference plane to produce a line beam that more closely conforms to the surface profile of the film.
1. A system for shaping laser light as a line beam for interaction with a film having a non-planar surface, said system comprising:
a beam stop defining an edge;
a sensor measuring a distance between a selected point on a surface of said film and a reference plane and generating a signal representative thereof; and
an actuator coupled to said beam stop and responsive to said signal for moving a portion of said edge relative to another portion of said edge to shift a portion of said focused line beam relative to another portion of said focused line beam in a direction normal to said reference plane.
2. A system as recited in claim 1 wherein said beam stop comprises a plurality of independently moveable beam stop segments which together define said edge.
3. A system as recited in claim 2 comprising a plurality of sensors, each said sensor measuring a distance between a respective point on a surface of said film and the reference plane and generating a respective signal representative thereof.
4. A system as recited in claim 3 comprising a plurality of actuators, each said actuator coupled to a respective said beam stop segment and responsive to a signal from a respective sensor for moving a portion of said edge to shift a corresponding portion of said focused line beam in a direction normal to said reference plane.
5. A system as recited in claim 1 wherein said sensor is an autofocus sensor.
6. A system as recited in claim 1 wherein said beam stop comprises a monolithic beam stop which defines said edge.
7. A system as recited in claim 6 comprising a plurality of sensors, each said sensor measuring a distance between a respective point on a surface of said film and the reference plane and generating a respective signal representative thereof.
8. A system as recited in claim 7 wherein said edge defines a curvature and wherein said system comprising a plurality of actuators, each said actuator coupled to a beam stop portion and responsive to a signal from a respective sensor for changing the curvature of said edge to shift a corresponding portion of said focused line beam in a direction normal to said reference plane.
9. A system as recited in claim 1 wherein said beam stop is a first beam stop and said system further comprises a second beam stop defining an edge, said second beam stop edge spaced from said first beam stop edge to establish a slit therebetween and an actuator coupled to said second beam stop and responsive to said signal for moving at least a portion of said second beam stop edge to shift at least a portion of said focused line beam in a direction normal to said reference plane.
10. An apparatus as recited in claim 1 wherein said beam stop is a reflective stop.
11. An apparatus as recited in claim 1 wherein said beam stop is an absorptive stop.
12. An apparatus as recited in claim 1 wherein said beam stop is a refractive stop.
13. A system for shaping laser light as a line beam for interaction with a film having a non-planar surface, said system comprising:
a beam stop;
a plurality of sensors measuring respective positions of respective selected points on a surface of said film and generating respective signals representative thereof; and
a plurality of actuators, each actuator coupled to said beam stop and responsive to a signal from a corresponding sensor to deflect a portion of said beam stop relative to another portion of said beam stop to shift a corresponding portion of said focused line beam relative to another portion of said focused line beam and relative to said film.
14. A system as recited in claim 13 wherein said beam stop comprises a plurality of independently moveable beam stop segments.
15. A system as recited in claim 13 wherein said sensors are autofocus sensors.
16. A system as recited in claim 13 wherein said system further comprises an optic for focusing light from said beam stop at said film.
17. A method for shaping laser light as a focused line beam for interaction with a film having a non-planar surface, said method comprising the acts of:
providing a beam stop defining an edge;
measuring a distance between a selected point on a surface of said film and a reference plane and generating a signal representative thereof; and
moving a portion of said edge relative to another portion of said edge in response to said signal to shift a portion of said focused line beam relative to another portion of said focused line beam in a direction normal to said reference plane.
18. A method as recited in claim 17 wherein said beam stop comprises a plurality of independently moveable beam stop segments.
19. A method as recited in claim 17 wherein said sensors are autofocus sensors.
20. A method as recited in claim 17 wherein said beam stop comprises a monolithic beam stop.