Patent Assignment
Reel/Frame 016647/0267
Assignment of Assignor's Interest
Recorded: 2005-10-17
Pages: 3
Assignors
ERSHOV, ALEXANDER I.
Executed: 2005-10-17
BYKANOV, ALEXANDER N.
Executed: 2005-10-05
KHODYKIN, OLEH
Executed: 2005-10-05
FOMENKOV, IGOR V.
Executed: 2005-10-05
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT., MS/4-2C, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Lpp Euv Light Source Drive Laser System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.