Patent Assignment
Reel/Frame 016834/0266
Assignment of Assignor's Interest
Recorded: 2005-11-30
Pages: 3
Assignors
PARTLO, WILLIAM N.
Executed: 2005-10-18
ERSHOV, ALEXANDER I.
Executed: 2005-10-17
FOMENKOV, IGOR V.
Executed: 2005-10-25
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT., MS/4-2C, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Euv Light Source Collector Erosion Mitigation
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.