Patent Assignment
Reel/Frame 032599/0068
Assignment of Assignor's Interest
Recorded: 2014-04-03
Pages: 2
Assignor
BYKANOV, ALEXANDER N
Executed: 2014-03-06
Assignee
CYMER, INC.
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems and Methods for Cleaning a Chamber Window of an Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.