Patent Assignment
Reel/Frame 032615/0947
Merger
Recorded: 2014-04-07
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT - MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems and Methods for Cleaning a Chamber Window of an Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.