Patent Assignment
Reel/Frame 032415/0735
Merger
Recorded: 2014-03-12
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT - MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(24)
Multi-Chambered Excimer or Molecular Fluorine Gas Discharge Laser Fluorine Injection Control
Laser Output Light Pulse Beam Parameter Transient Correction System
Relax Gas Discharge Laser Lithography Light Source
Lpp Euv Light Source
Euv Collector Debris Management
Line Narrowing Module
Method and Apparatus for Euv Plasma Source Target Delivery Target Material Handling
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Gas Discharge Laser Output Light Beam Parameter Control
Systems and Methods for Implementing an Interaction Between a Laser Shaped as a Line Beam and a Film Deposited on a Substrate
Euv Light Source Collector Lifetime Improvements
Lpp Euv Drive Laser Input System
Spectral Bandwidth Metrology for High Repetition Rate Gas Discharge Lasers
High Pulse Repetition Rate Gas Discharge Laser
Gas Discharge Laser Line Narrowing Module
Active Bandwidth Control for a Laser
Systems and Methods for Reducing the Influence of Plasma-Generated Debris on the Internal Components of an Euv Light Source
Lpp Euv Plasma Source Material Target Delivery System
Systems and Methods for Euv Light Source Metrology
Confocal Pulse Stretcher
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Systems for Protecting Internal Components of an Euv Light Source from Plasma-Generated Debris
Systems and Methods for Reducing the Influence of Plasma-Generated Debris on the Internal Components of an Euv Light Source
Lpp Euv Plasma Source Material Target Delivery System
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Corrective Assignment to Correct the Recordation Form Cover Sheet, 2. Name and Address of Receiving Party(Ies) Previously Recorded on Reel 016188 Frame 0436. Assignor(S) Hereby Confirms the Assignment from Inventors to Cymer, Inc.
Apr 23, 2012
From: BYKANOV, ALEXANDER N.
To: CYMER, INC.
Reel/Frame 028093/0343 →
Assignment of Assignor's Interest
Apr 10, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032659/0256 →
Assignment of Assignor's Interest
Apr 23, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032745/0216 →