Gas discharge laser line narrowing module
View Patent ↗A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.
1. A line narrowed gas discharge laser system comprising
a dispersive center wavelength selective element;
a beam expander comprising a plurality of refractive elements;
a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element;
each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element;
a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system, whereby the housing positioning element comprises a position locking mechanism and the housing comprising a front plate tilted by the housing positioning mechanism about a pivot point comprising a point of contact between a mounting mechanism and a portion of the front plate.
2. The apparatus of claim 1 further comprising:
the dispersive element comprises a grating.
3. The apparatus of claim 1 further comprising:
the beam expander comprises a plurality of prisms.
4. The apparatus of claim 2 further comprising:
the beam expander comprises a plurality of prisms.
5. The apparatus of claim 1 further comprising:
the housing containing the dispersive center wavelength selective element and the beam expander.
6. The apparatus of claim 2 further comprising:
the housing containing the dispersive center wavelength selective element and the beam expander.
7. The apparatus of claim 3 further comprising:
the housing containing the dispersive center wavelength selective element and the beam expander.
8. The apparatus of claim 4 further comprising:
the housing containing the dispersive center wavelength selective element and the beam expander.