IP Library Granted Patent US 7,641,349
Granted Patent B1
US 7,641,349 · App. 12/284,585 · Granted Jan 5, 2010

Systems and methods for collector mirror temperature control using direct contact heat transfer

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Quick Facts
Patent No.
US 7,641,349
App. No.
12/284,585
Granted
Jan 5, 2010
Kind
B1
Abstract

As disclosed herein, a device may comprise an optic disposed in a near vacuum environment, the optic formed with a surface portion; a temperature controlled member formed with a surface portion conforming to the optic surface portion; and a liquid interposed between the optic surface portion and the member surface portion to conduct heat therebetween.

Claims (34)

1. A device, comprising:

an optic disposed in a near vacuum environment, said optic formed with a surface portion;

a temperature controlled member formed with a surface portion conforming to said optic surface portion; and

a liquid interposed between said optic surface portion and said member surface portion to conduct heat therebetween.

2. A device as recited in claim 1 wherein at least one of said member surface portion and said optic surface portion is formed with a solid texture to promote spontaneous invasion of the liquid by interfacial surface tension.

3. A device as recited in claim 1 wherein said liquid is a metal comprises an element selected from the group of elements consisting of mercury, gallium, tin and indium.

4. A device as recited in claim 1 further comprising a structure formed with a plurality of through-holes, the structure interposed between said member surface portion and said optic surface portion to retain said liquid between said surfaces by interfacial surface tension.

5. A device as recited in claim 4 wherein said structure comprises a mesh.

6. A device as recited in claim 1 wherein said optic is a mirror having a substrate and a surface portion covered with a multi-layer reflective coating.

7. A device as recited in claim 6 wherein said mirror substrate is made of a material selected from the group of materials consisting of silicon and silicon carbide.

8. A device as recited in claim 1 wherein said temperature controlled member comprises a conductive block formed with at least one passageway for flowing a heat exchange fluid therethrough.

9. A device as recited in claim 1 wherein said temperature controlled member comprises a conductive block coupled to at least one resistive heater.

10. A device, comprising:

an optic,

a temperature controlled member; and

a non-sealing means for maintaining a liquid metal between said optic and said member to conduct heat therebetween.

11. A device as recited in claim 10 wherein said optic is located in an environment maintained at below atmospheric pressure.

12. A device as recited in claim 10 wherein said non-sealing means comprises a surface texture formed on at least one of said temperature controlled member and said optic.

13. A device as recited in claim 10 wherein said non-sealing means comprises a structure formed with a plurality of through-holes, the structure interposed between said member and said optic.

14. A device as recited in claim 10 wherein said optic comprises a substrate made of a material comprising silicon.

15. A device as recited in claim 10 wherein said temperature controlled member comprises a conductive block formed with at least one passageway for flowing a heat exchange fluid.

16. A device as recited in claim 10 wherein said temperature controlled member comprises a conductive block coupled to at least one resistive heater.

17. A method comprising the steps of:

disposing an optic in a near vacuum environment, said optic formed with a surface portion;

providing a temperature controlled member formed with a surface portion conforming to said optic surface portion; and

interposing a liquid material between said optic surface portion and said member surface portion to conduct heat therebetween.

18. A method as recited in claim 17 wherein said interposing step comprises the sub-steps of:

solidifying the material on at least one of said member surface portion and said optic surface portion;

juxtaposing said member surface portion with said optic surface portion; and

heating said material to liquefy said material.

19. A method as recited in claim 17 wherein at least one of said member surface portion and said optic surface portion is formed with a solid texture to promote spontaneous invasion of the liquid by interfacial surface tension.

20. A method as recited in claim 17 further comprising the steps of:

providing a structure formed with a plurality of through-holes; and

positioning the structure between said member surface portion and said optic surface portion to retain said liquid between said surfaces by interfacial surface tension.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032860/0748 →
MERGER Recorded Mar 13, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032427/0529 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 7, 2008
From: CHROBAK, CHRISTOPHER P.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 021803/0356 →