Patent Assignment
Reel/Frame 032420/0153
Merger
Recorded: 2014-03-12
Pages: 24
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT - MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(26)
Laser Produced Plasma Euv Light Source
Laser System
Extendable Electrode for Gas Discharge Laser
Laser Gas Injection System
Device and method to create a low divergence, high power laser beam for material processing applications
Cross-Flow Fan Impeller for a Transversley Excited, Pulsed, Gas Discharge Laser
Laser Produced Plasma Euv Light Source Having a Droplet Stream Produced Using a Modulated Disturbance Wave
Gas Management System for a Laser-Produced-Plasma Euv Light Source
Ultraviolet Laser Light Source Pulse Energy Control System
Immersion Lithography Laser Light Source with Pulse Stretcher
Laser System
System Managing Gas Flow Between Chambers of an Extreme Ultraviolet (Euv) Photolithography Apparatus
Method and Apparatus for Vibration Reduction in Laser System Line Narrowing Unit Wavelength Selection Optical Element
Drive Laser for Euv Light Source
Illumination Apparatus and Method for Controlling Energy of a Laser Source
Method and Apparatus for Stabilizing and Tuning the Bandwidth of Laser Light
Laser Lithography System with Improved Bandwidth Control
Blind Motorized Coupling Arrangements for Coupling Uv Light Source Subsystem and Scanner Subsystem in a Uv Lithography System and Methods Therefor
Systems and Methods for Target Material Delivery in a Laser Produced Plasma Euv Light Source
Debris protection system having a magnetic field for an EUV light source
Very High Power Laser Chamber Optical Improvements
Extendable Electrode for Gas Discharge Laser
Laser System
Laser System
Extendable Electrode for Gas Discharge Laser
Laser-Produced-Plasma Euv Light Source
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Corrective Assignment to Correct the Receiving Party from Carl Zeiss Smt Ag to Carl Zeiss Laser Optics Gmbh Previously Recorded on Reel 020694 Frame 0095. Assignor(S) Hereby Confirms the Correction.
Mar 24, 2014
From: WEIGL, BERNHARD; SANDSTROM, RICK
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 032513/0299 →
Assignment of Assignor's Interest
May 9, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032860/0748 →
Merger
Sep 22, 2016
From: CARL ZEISS LASER OPTICS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040107/0446 →