IP Library Granted Patent US 8,284,815
Granted Patent B2
US 8,284,815 · App. 12/577,077 · Granted Oct 9, 2012

Very high power laser chamber optical improvements

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Quick Facts
Patent No.
US 8,284,815
App. No.
12/577,077
Granted
Oct 9, 2012
Kind
B2
Abstract

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.

Claims (24)

1. A beam reverser prism comprising: a chamfered corner opposite an input face of the prism, wherein the chamfered corner is between a first reflective face and a second reflective face wherein the chamfered corner has a chamfered surface and wherein the surface is less than about 0.5 mm in width, wherein a first distance between a first incident point and a chamfered corner, wherein a first distance is between a first incident point and a chamfered corner, wherein the first incident point is on the first reflective face of the prism and the chamfered corner is formed between the first reflective face and a second reflective face of the prism, wherein an input laser beam is directed to the first incident point, wherein the chamfered corner includes a polished chamfered surface, the polished chamfered surface includes a polished finish substantially equal to a reflective surface finish of at least one of the input face, the first reflective face and the second reflective face.

2. The beam reverser prism of claim 1 , wherein the prism is a prime cut prism, the prime cut for the prism includes: identifying a physical stress birefringence for the optical component including thermal stress and the mechanical stress; identifying an ideal birefringence model for the selected optical component; modeling a plurality of crystal alignments for the selected optical component; applying the thermal stress and the mechanical stress for the selected optical component into each one of the plurality of crystal alignments for the selected optical component; producing one of a plurality of birefringence models corresponding to each one of the plurality of crystal alignments for the selected optical component; comparing each one of the plurality of birefringence models to the ideal birefringence model; and wherein the prism has a crystal alignment that most closely matches the ideal birefringence model.

3. The beam reverser of claim 1 , further comprising:

a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism.

4. The beam reverser of claim 1 , further comprising a third distance between the prism and a laser source, wherein the third distance is equal to a distance between the first incident point on the first reflective surface of the prism and a laser output window of the laser source.

5. The beam reverser of claim 1 , wherein the polished chamfered surface includes a fine surface finish to the chamfered surface.

6. The beam reverser of claim 1 , wherein the beam reverser is included in a laser system.

7. The beam reverser of claim 6 , wherein the laser system further includes:

a seed laser source; and

a power ring oscillator having a laser input optically coupled to a seed laser output, the power ring oscillator including:

a first input prism;

a first output prism;

a first window;

a second window;

a second output prism; and

an output coupler, wherein at least one of the first output prism, the first window, the second window, the beam reverser and the output coupler is a prime cut optical component.

8. The beam reverser of claim 7 , further including:

a beam splitter;

a pulse stretcher.

9. The beam reverser of claim 7 , wherein the first output prism is a prime cut prism having a crystal structure of the first output prism oriented so that a polarization loss due to stress-birefringence is minimized.

10. The beam reverser of claim 7 , wherein the first window is a prime cut window having a crystal structure of the first window oriented so that a polarization loss due to stress-birefringence is minimized.

11. The beam reverser of claim 7 , wherein the second window is a prime cut window having a crystal structure of the second window oriented so that a polarization loss due to stress-birefringence is minimized.

12. The beam reverser of claim 6 , wherein the beam reverser includes a prime cut beam reversing prism having a crystal structure of the beam reverser prism oriented so that a polarization loss due to stress-birefringence is minimized.

13. The beam reverser of claim 7 , wherein the output coupler is a prime cut output coupler having a crystal structure of the output coupler oriented so that a polarization loss due to stress-birefringence is minimized

Assignments (2)
MERGER Recorded Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032420/0153 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 7, 2009
From: YE, HONG; ERSHOV, ALEX; RAO, RAJASEKHAR; BROWN, DANIEL; ROKITSKI, SLAVA; LIU, RONG (LAUREN); CYBULSKI, RAY; FERRELL, JAMES J.; BERGSTEDT, ROBERT; VIATELLA, JOHN; DUFFEY, THOMAS P.
To: CYMER, INC.
Reel/Frame 023624/0562 →