Patent Assignment
Reel/Frame 032513/0299
Corrective Assignment to Correct the Receiving Party from Carl Zeiss Smt Ag to Carl Zeiss Laser Optics Gmbh Previously Recorded on Reel 020694 Frame 0095. Assignor(S) Hereby Confirms the Correction.
Recorded: 2014-03-24
Pages: 8
Assignee
CARL ZEISS LASER OPTICS GMBH
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Apparatus and Method for Controlling Energy of a Laser Source
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 24, 2008
From: WEIGL, BERNHARD; SANDSTROM, RICK
To: CARL ZEISS SMT AG; CYMER INC.
Reel/Frame 020694/0095 →
Merger
Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032420/0153 →
Merger
Sep 22, 2016
From: CARL ZEISS LASER OPTICS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040107/0446 →