Patent Assignment
Reel/Frame 020694/0095
Assignment of Assignor's Interest
Recorded: 2008-03-24
Pages: 5
Assignees
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
CYMER INC.
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Illumination Apparatus and Method for Controlling Energy of a Laser Source
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Merger
Mar 12, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032420/0153 →
Corrective Assignment to Correct the Receiving Party from Carl Zeiss Smt Ag to Carl Zeiss Laser Optics Gmbh Previously Recorded on Reel 020694 Frame 0095. Assignor(S) Hereby Confirms the Correction.
Mar 24, 2014
From: WEIGL, BERNHARD; SANDSTROM, RICK
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 032513/0299 →
Merger
Sep 22, 2016
From: CARL ZEISS LASER OPTICS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040107/0446 →