Patent Assignment
Reel/Frame 031438/0655
Assignment of Assignor's Interest
Recorded: 2013-10-18
Pages: 4
Assignors
ERSHOV, ALEXANDER I.
Executed: 2008-02-12
FOMENKOV, IGOR V.
Executed: 2013-09-06
BOWERING, NORBERT
Executed: 2008-02-12
HOFFMAN, JERZY R.
Executed: 2008-02-12
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROPERTY DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Drive Laser for Euv Light Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.