Patent Assignment
Reel/Frame 026138/0089
Assignment of Assignor's Interest
Recorded: 2011-04-15
Pages: 2
Assignors
BYKANOV, ALEXANDER N.
Executed: 2011-04-15
DE DEA, SILVIA
Executed: 2011-04-01
ERSHOV, ALEXANDER I.
Executed: 2011-04-01
FLEUROV, VLADIMIR B.
Executed: 2011-04-01
FOMENKOV, IGOR V.
Executed: 2011-03-29
PARTLO, WILLIAM N.
Executed: 2011-03-29
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Systems and Methods for Optics Cleaning in an Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.