Patent Assignment
Reel/Frame 024221/0466
Assignment of Assignor's Interest
Recorded: 2010-04-12
Pages: 4
Assignors
CHROBAK, CHRIS
Executed: 2010-03-23
PARTLO, WILLIAM N.
Executed: 2010-03-30
FOMENKOV, IGOR V.
Executed: 2010-03-31
ERSHOV, ALEXANDER I.
Executed: 2009-06-11
CROUCH, JAMES H.
Executed: 2010-03-18
Assignee
CYMER, INC.
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.