Patent Assignment
Reel/Frame 026317/0549
Assignment of Assignor's Interest
Recorded: 2011-05-20
Pages: 4
Assignors
FOMENKOV, IGOR V.
Executed: 2011-05-20
PARTLO, WILLIAM N.
Executed: 2011-05-19
VASCHENKO, GEORGIY O.
Executed: 2011-05-17
OLDHAM, WILLIAM
Executed: 2011-05-16
Assignee
CYMER, INC.
17075 THORNMINT CT., SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Filter for Material Supply Apparatus of an Extreme Ultraviolet Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.