Patent Assignment
Reel/Frame 026416/0404
Assignment of Assignor's Interest
Recorded: 2011-06-09
Pages: 3
Assignors
FLEUROV, VLADIMIR B.
Executed: 2011-06-07
PARTLO, WILLIAM N.
Executed: 2011-06-07
FOMENKOV, IGOR V.
Executed: 2011-06-07
ERSHOV, ALEXANDER I.
Executed: 2011-06-03
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Systems and Methods for Buffer Gas Flow Stabilization in a Laser Produced Plasma Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.