Patent Assignment
Reel/Frame 032445/0511
Merger
Recorded: 2014-03-14
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(18)
System and Method for Extending Gas Life in a Two Chamber Gas Discharge Laser System
Laser Produced Plasma Euv Light Source
System and Method for Separating a Main Pulse and a Pre-Pulse Beam from a Laser Source
System and Method to Optimize Extreme Ultraviolet Light Generation
System and Method for Seed Laser Mode Stabilization
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
Harsh Environment Optical Element Protection
Intracavity Loss Element for Power Amplifier
Patent:
8,563,956 →
Application:
13/650,261 →
Target Material Supply Apparatus for an Extreme Ultraviolet Light Source
Viewport Protector for an Extreme Ultraviolet Light Source
System and Method for Protecting a Seed Laser in an Euv Light Source with a Bragg Aom
Thermal Monitor For An Extreme Ultraviolet Light Source
Target for Extreme Ultraviolet Light Source
Patent:
8,791,440 →
Application:
13/830,380 →
Target for Laser Produced Plasma Extreme Ultraviolet Light Source
Active Spectral Control During Spectrum Synthesis
Controlling Spatial Properties in an Excimer Ring Amplifier
Patent:
8,624,209 →
Application:
13/830,905 →
Corrosion Resistant Electrodes for Laser Chambers
Extreme Ultraviolet Light Source
Patent:
8,680,495 →
Application:
13/843,626 →
Related Assignments
(23)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 19, 2012
From: RIGGS, DANIEL J.
To: CYMER, INC.
Reel/Frame 027889/0254 →
Assignment of Assignor's Interest
May 17, 2012
From: VASCHENKO, GEORGIY O.
To: CYMER, INC.
Reel/Frame 028229/0638 →
Assignment of Assignor's Interest
Jul 11, 2012
From: BERGSTEDT, ROBERT A.; PATE, CHRISTOPHER PAUL; ARCAND, JASON MICHAEL
To: CYMER, INC.
Reel/Frame 028532/0392 →
Assignment of Assignor's Interest
Sep 7, 2012
From: FRIHAUF, PAUL; RIGGS, DANIEL J.; GRAHAM, MATTHEW R.; CHANG, STEVEN
To: CYMER, INC.
Reel/Frame 028914/0578 →
Assignment of Assignor's Interest
Oct 12, 2012
From: MELCHIOR, JOHN; RAFAC, ROBERT J.; ROKITSKI, ROSTISLAV
To: CYMER, INC.
Reel/Frame 029119/0511 →
Assignment of Assignor's Interest
Oct 16, 2012
From: DE DEA, SILVIA; BAUMGART, PETER; VASCHENKO, GEORGIY; BOWERING, NORBERT
To: CYMER, INC.
Reel/Frame 029136/0641 →
Assignment of Assignor's Interest
Nov 7, 2012
From: SENEKERIMYAN, VAHAN
To: CYMER, INC.
Reel/Frame 029259/0124 →
Assignment of Assignor's Interest
Nov 20, 2012
From: VAN DER BURGT, JEROEN; GRAHAM, MATTHEW R.; KINNEY, CHARLES; DUNSTAN, WAYNE J.
To: CYMER, INC.
Reel/Frame 029333/0347 →
Assignment of Assignor's Interest
Dec 13, 2012
From: SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 029464/0244 →
Assignment of Assignor's Interest
Jan 16, 2013
From: ERSHOV, ALEXANDER I.; BOWERING, NORBERT R.; LA FONTAINE, BRUNO M.; DE DEA, SILVIA
To: CYMER, INC.
Reel/Frame 029640/0348 →
Assignment of Assignor's Interest
Jan 22, 2013
From: FLEUROV, VLADIMIR; FOMENKOV, IGOR; SRIVASTAVA, SHALIENDRA
To: CYMER, INC.
Reel/Frame 029672/0959 →
Assignment of Assignor's Interest
Mar 25, 2013
From: SANDSTROM, RICHARD L.; GRAVA, JONATHAN D.
To: CYMER, INC.
Reel/Frame 030080/0413 →
Assignment of Assignor's Interest
Apr 22, 2013
From: ROKITSKI, ROSTISLAV; SEONG, NAKGEUON; O'BRIEN, KEVIN
To: CYMER, INC.
Reel/Frame 030313/0641 →
Assignment of Assignor's Interest
May 2, 2013
From: RAFAC, ROBERT J.; TAO, YEZHENG
To: CYMER, INC.
Reel/Frame 030337/0394 →
Assignment of Assignor's Interest
May 6, 2013
From: RAFAC, ROBERT JAY; WAN, DERSHEN; MASON, ERIC; ROKITSKI, ROSTISLAV
To: CYMER, INC.
Reel/Frame 030352/0875 →
Assignment of Assignor's Interest
Jun 4, 2013
From: TAO, YEZHENG; RAFAC, ROBERT J.; FOMENKOV, IGOR V.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 030546/0184 →
Assignment of Assignor's Interest
Jun 25, 2013
From: TAO, YEZHENG; RAFAC, ROBERT J.; FOMENKOV, IGOR V.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 030684/0429 →
Assignment of Assignor's Interest
Oct 7, 2013
From: KARDOKUS, JANINE; DUFFEY, THOMAS P.; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 031358/0781 →
Assignment of Assignor's Interest
Apr 29, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032784/0624 →
Assignment of Assignor's Interest
May 16, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032911/0555 →
Assignment of Assignor's Interest
Sep 4, 2015
From: LAMBERT, MARTIN
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
Reel/Frame 036495/0896 →
Change of Name
Jan 27, 2025
From: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
Reel/Frame 070014/0571 →
Change of Name
Jan 27, 2025
From: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG
Reel/Frame 070015/0125 →