Patent Assignment
Reel/Frame 030080/0413
Assignment of Assignor's Interest
Recorded: 2013-03-25
Pages: 2
Assignee
CYMER, INC.
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System and Method for Protecting a Seed Laser in an Euv Light Source with a Bragg Aom
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.