Patent Assignment
Reel/Frame 029333/0347
Assignment of Assignor's Interest
Recorded: 2012-11-20
Pages: 3
Assignors
VAN DER BURGT, JEROEN
Executed: 2012-11-09
GRAHAM, MATTHEW R.
Executed: 2012-11-09
KINNEY, CHARLES
Executed: 2012-11-06
DUNSTAN, WAYNE J.
Executed: 2012-11-13
Assignee
CYMER, INC.
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.