Patent Assignment
Reel/Frame 029136/0641
Assignment of Assignor's Interest
Recorded: 2012-10-16
Pages: 5
Assignors
DE DEA, SILVIA
Executed: 2012-10-12
BAUMGART, PETER
Executed: 2012-10-12
VASCHENKO, GEORGIY
Executed: 2012-10-15
BOWERING, NORBERT
Executed: 2012-10-16
Assignee
CYMER, INC.
17075 THORNMINT CT., SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Target Material Supply Apparatus for an Extreme Ultraviolet Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.