IP Library › Patent Application 61784548
Patent Application Provisional
App. No. 61/784,548 · Confirmation No. 7238

METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL

Applicant: CYMER, INC.
Provisional Application Expired
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 Code Description Pages PDF
2013-06-11 APP.FILE.REC Filing Receipt 3 View
2013-05-24 CFILE Request for Corrected Filing Receipt 5 View
2013-05-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-05-24 WFEE Fee Worksheet (SB06) 1 View
2013-04-17 APP.FILE.REC Filing Receipt 3 View
2013-03-25 ADS Application Data Sheet 8 View
2013-03-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-03-14 ADS Application Data Sheet 8 View
2013-03-14 SPEC Specification 18 View
2013-03-14 CLM Claims 7 View
2013-03-14 ABST Abstract 1 View
2013-03-14 DRW Drawings-only black and white line drawings 10 View
2013-03-14 WFEE Fee Worksheet (SB06) 2 View
2013-03-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/784,548
Filed
2013-03-14