Patent Assignment
Reel/Frame 031180/0558
Assignment of Assignor's Interest
Recorded: 2013-09-11
Pages: 11
Assignors
CHANG, CHE-MING
Executed: 2013-09-06
TSENG, LEE-CHUAN
Executed: 2013-09-09
LIN, SHIH-WEI
Executed: 2013-09-06
CHAN, CHIH-JEN
Executed: 2013-09-06
HSIEH, YUAN-CHIH
Executed: 2013-09-09
LIU, MING CHYI
Executed: 2013-09-10
CHOU, CHUNG-YEN
Executed: 2013-09-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Noble Gas Bombardment to Reduce Scallops in Bosch Etching