Patent Assignment
Reel/Frame 031182/0881
Assignment of Assignor's Interest
Recorded: 2013-09-11
Pages: 4
Assignors
CHEN, CHING-FA
Executed: 2013-09-11
CHEN, HUNG-WEN
Executed: 2013-09-11
WU, MEI-WEI
Executed: 2013-09-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Mechanisms for Cleaning Load Ports of Semiconductor Process Tools