Patent Assignment
Reel/Frame 031195/0086
Assignment of Assignor's Interest
Recorded: 2013-09-12
Pages: 10
Assignors
LILL, THORSTEN
Executed: 2013-07-17
SCHUEGRAF, KLAUS
Executed: 2013-08-22
LUBOMIRSKY, DMITRY
Executed: 2013-07-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Pulsed Plasma with Low Wafer Temperature for Ultra Thin Layer Etches