Patent Assignment
Reel/Frame 031200/0961
Assignment of Assignor's Interest
Recorded: 2013-09-13
Pages: 4
Assignor
KOBAYASHI, SENSHO
Executed: 2013-08-30
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus