Patent Assignment
Reel/Frame 031205/0899
Assignment of Assignor's Interest
Recorded: 2013-09-13
Pages: 3
Assignors
LIU, CHI-JEN
Executed: 2013-09-03
WU, LI-CHIEH
Executed: 2013-09-03
SUEN, SHICH-CHANG
Executed: 2013-09-03
CHEN, LIANG-GUANG
Executed: 2013-09-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Oxidation and Etching Post Metal Gate CMP