Patent Assignment
Reel/Frame 031214/0594
Assignment of Assignor's Interest
Recorded: 2013-09-16
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Spacer, Spacer Transferring Method, Processing Method and Processing Apparatus