Patent Assignment
Reel/Frame 031222/0871
Assignment of Assignor's Interest
Recorded: 2013-09-17
Pages: 4
Assignors
CARDUCCI, JAMES D.
Executed: 2013-08-30
COLLINS, KENNETH S.
Executed: 2013-09-11
FOVELL, RICHARD
Executed: 2013-08-29
KENNEY, JASON A.
Executed: 2013-08-29
RAMASWAMY, KARTIK
Executed: 2013-08-29
RAUF, SHAHID
Executed: 2013-09-06
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Symmetrical Inductively Coupled Plasma Source with Side Rf Feeds and Rf Distribution Plates