Patent Assignment
Reel/Frame 031238/0973
Assignment of Assignor's Interest
Recorded: 2013-09-19
Pages: 5
Assignors
DARLING, SETH B.
Executed: 2013-08-23
ELAM, JEFFREY W.
Executed: 2013-08-23
TSENG, YU-CHIH
Executed: 2013-07-26
Assignee
UCHICAGO ARGONNE, LLC
5801 SOUTH ELLIS AVENUE, CHICAGO, ILLINOIS, 60637
Covered Property
(1)
Sequential Infiltration Synthesis for Enhancing Multiple-Patterning Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.