Patent Assignment
Reel/Frame 031246/0798
Assignment of Assignor's Interest
Recorded: 2013-09-20
Pages: 3
Assignors
YAMAMOTO, KAORU
Executed: 2013-08-26
HARA, MASAMICHI
Executed: 2013-08-26
MIYASHITA, TETSUYA
Executed: 2013-08-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gate Valve Unit, Substrate Processing Device and Substrate Processing Method Thereof