Patent Assignment
Reel/Frame 031253/0923
Assignment of Assignor's Interest
Recorded: 2013-09-20
Pages: 4
Assignors
DHINDSA, RAJINDER
Executed: 2013-08-24
NAM, SANG KI
Executed: 2013-08-26
MARAKHTANOV, ALEXEI
Executed: 2013-08-24
HUDSON, ERIC A
Executed: 2013-08-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ion to Neutral Control for Wafer Processing with Dual Plasma Source Reactor