Patent Assignment
Reel/Frame 031272/0436
Assignment of Assignor's Interest
Recorded: 2013-09-24
Pages: 3
Assignor
FOMENKOV, IGOR V.
Executed: 2013-09-24
Assignee
CYMER, LLC
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System and Method for Laser Beam Focus Control for Extreme Ultraviolet Laser Produced Plasma Source
Patent:
8,872,144 →
Application:
14/035,847 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.