Patent Assignment
Reel/Frame 031275/0592
Assignment of Assignor's Interest
Recorded: 2013-09-25
Pages: 3
Assignor
YOSHIDA, RYOICHI
Executed: 2013-09-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method