Patent Assignment
Reel/Frame 031279/0939
Assignment of Assignor's Interest
Recorded: 2013-09-25
Pages: 5
Assignors
YAMAGUCHI, DAIGO
Executed: 2013-08-28
TAKEDA, TSUYOSHI
Executed: 2013-08-28
SATO, TAKETOSHI
Executed: 2013-08-28
YOSHIDA, HIDENARI
Executed: 2013-08-28
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.