Patent Assignment
Reel/Frame 031307/0551
Assignment of Assignor's Interest
Recorded: 2013-09-30
Pages: 4
Assignors
SAITO, TAKEHISA
Executed: 2013-09-17
INOKUCHI, ATSUTOSHI
Executed: 2013-09-18
MASUDA, SHOGO
Executed: 2013-09-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Deposition Method and Deposition Apparatus