Patent Assignment
Reel/Frame 031316/0154
Assignment of Assignor's Interest
Recorded: 2013-10-01
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Purging Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.