Patent Assignment
Reel/Frame 031321/0941
Assignment of Assignor's Interest
Recorded: 2013-10-01
Pages: 5
Assignors
HUANG, YEN-CHUN
Executed: 2013-06-14
SHIEH, MING-FENG
Executed: 2013-05-09
LAI, CHIH-MING
Executed: 2013-05-09
HSIEH, KEN-HSIEN
Executed: 2013-05-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Patterning Method for Semiconductor Device Fabrication