Patent Assignment
Reel/Frame 031330/0821
Assignment of Assignor's Interest
Recorded: 2013-10-02
Pages: 7
Assignors
HIROSE, YOSHIRO
Executed: 2013-08-29
SANO, ATSUSHI
Executed: 2013-08-29
OKUDA, KAZUYUKI
Executed: 2013-08-29
MAEDA, KIYOHIKO
Executed: 2013-08-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Method of Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.