Patent Assignment
Reel/Frame 031348/0455
Assignment of Assignor's Interest
Recorded: 2013-10-04
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tunable Upper Plasma-Exclusion-Zone Ring for a Bevel Etcher