Patent Assignment
Reel/Frame 031349/0149
Assignment of Assignor's Interest
Recorded: 2013-10-04
Pages: 4
Assignors
GOSHI, GENTARO
Executed: 2013-05-22
MITSUOKA, KAZUYUKI
Executed: 2013-05-28
YOU, GEN
Executed: 2013-05-31
OHNO, HIROKI
Executed: 2013-05-28
ORII, TAKEHIKO
Executed: 2013-05-28
TOSHIMA, TAKAYUKI
Executed: 2013-06-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, Fluid Supplying Method and Storage Medium