Patent Assignment
Reel/Frame 031357/0932
Assignment of Assignor's Interest
Recorded: 2013-10-07
Pages: 4
Assignors
SHIH, CHIH-TSUNG
Executed: 2013-09-02
LU, YEN-CHENG
Executed: 2013-09-02
YU, SHINN-SHENG
Executed: 2013-09-02
CHEN, JENG-HORNG
Executed: 2013-09-02
YEN, ANTHONY
Executed: 2013-09-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet (EUV) Mask, Method Of Fabricating The EUV Mask And Method Of Inspecting The EUV Mask