Patent Assignment
Reel/Frame 031376/0338
Assignment of Assignor's Interest
Recorded: 2013-10-09
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Ti-Containing Film by Peald Using Tdmat or Tdeat