Patent Assignment
Reel/Frame 031423/0039
Assignment of Assignor's Interest
Recorded: 2013-10-17
Pages: 4
Assignors
TSUBUKU, MASASHI
Executed: 2013-10-01
WATANABE, RYOSUKE
Executed: 2013-10-02
ISHIHARA, NORITAKA
Executed: 2013-10-08
OOTA, MASASHI
Executed: 2013-10-01
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Forming Multilayer Film Including Oxide Semiconductor Film and Method for Manufacturing Semiconductor Device